Deposition and characterization of Ti2AlC MAX phase and Ti3AlC thin films by magnetron sputtering

Published 2016 View Full Article

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Title
Deposition and characterization of Ti2AlC MAX phase and Ti3AlC thin films by magnetron sputtering
Authors
Keywords
Thin films, Ti, 2, AlC, Deposition, Ceramics, Ti, 3, AlC
Journal
MATERIALS LETTERS
Volume 179, Issue -, Pages 194-197
Publisher
Elsevier BV
Online
2016-05-17
DOI
10.1016/j.matlet.2016.05.086

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