Influence of ion–atom arrival ratio on structure and optical properties of ZrN x films

Published 2016 View Full Article

Authors

Keywords

Ion-atom arrival ratio, Zirconium nitride, Ion beam assisted deposition, Optical properties

Journal

MATERIALS LETTERS

Volume 164, Issue -, Pages 291-293

Publisher

Elsevier BV

Online

2015-10-21

DOI

10.1016/j.matlet.2015.10.037

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