Heavily Doped Si Nanocrystals Formed in P-(SiO/SiO2) Multilayers: A Promising Route for Si-Based Infrared Plasmonics
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Title
Heavily Doped Si Nanocrystals Formed in P-(SiO/SiO2) Multilayers: A Promising Route for Si-Based Infrared Plasmonics
Authors
Keywords
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Journal
ACS Applied Nano Materials
Volume 6, Issue 5, Pages 3312-3320
Publisher
American Chemical Society (ACS)
Online
2023-02-22
DOI
10.1021/acsanm.2c05088
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