High growth temperature for AlN by jet stream gas flow metalorganic vapor phase epitaxy
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Title
High growth temperature for AlN by jet stream gas flow metalorganic vapor phase epitaxy
Authors
Keywords
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Journal
Scientific Reports
Volume 13, Issue 1, Pages -
Publisher
Springer Science and Business Media LLC
Online
2023-02-11
DOI
10.1038/s41598-023-29150-6
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Note: Only part of the references are listed.- Reduction of parasitic reaction in high-temperature AlN growth by jet stream gas flow metal–organic vapor phase epitaxy
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