Effect of reactor pressure on the conformal coating inside porous substrates by atomic layer deposition

Published 2016 View Full Article

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Title
Effect of reactor pressure on the conformal coating inside porous substrates by atomic layer deposition
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 35, Issue 2, Pages 021502
Publisher
American Vacuum Society
Online
2016-12-30
DOI
10.1116/1.4973350

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