Effect of reactor pressure on the conformal coating inside porous substrates by atomic layer deposition

标题
Effect of reactor pressure on the conformal coating inside porous substrates by atomic layer deposition
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 35, Issue 2, Pages 021502
出版商
American Vacuum Society
发表日期
2016-12-30
DOI
10.1116/1.4973350

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