Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources

出版年份 2016 全文链接

标题

作者

关键词

出版物

Volume 34, Issue 1, Pages 01B103

出版商

American Vacuum Society

发表日期

2015-12-03

DOI

10.1116/1.4936622

Discuss science. Find collaborators. Network.

Join a conversation

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started