On the micrometre precise mould filling of liquid polymer derived ceramic precursor for 300-µm-thick high aspect ratio ceramic MEMS

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Title
On the micrometre precise mould filling of liquid polymer derived ceramic precursor for 300-µm-thick high aspect ratio ceramic MEMS
Authors
Keywords
Polymer derived ceramic, Micro-moulding, Capillary filling, Wetting angle
Journal
CERAMICS INTERNATIONAL
Volume 41, Issue 1, Pages 623-629
Publisher
Elsevier BV
Online
2014-09-02
DOI
10.1016/j.ceramint.2014.08.112

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