On the micrometre precise mould filling of liquid polymer derived ceramic precursor for 300-µm-thick high aspect ratio ceramic MEMS

出版年份 2015 全文链接

标题

作者

关键词

Polymer derived ceramic, Micro-moulding, Capillary filling, Wetting angle

出版物

Volume 41, Issue 1, Pages 623-629

出版商

Elsevier BV

发表日期

2014-09-02

DOI

10.1016/j.ceramint.2014.08.112

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