Thermal Atomic Layer Deposition of Lithium Phosphorus Oxynitride as a Thin-Film Solid Electrolyte

Atomic Layer Deposition of Lithium Phosphorus Oxynitride

(2015) Mikko Nisula et al.   CHEMISTRY OF MATERIALS

Atomic Layer Deposition of the Solid Electrolyte LiPON

(2015) Alexander C. Kozen et al.   CHEMISTRY OF MATERIALS

Ultra-thin LiPON films – Fundamental properties and application in solid state thin film model batteries

(2015) Susann Nowak et al.   JOURNAL OF POWER SOURCES

Atomic layer deposition of lithium phosphates as solid-state electrolytes for all-solid-state microbatteries

(2014) Biqiong Wang et al.   NANOTECHNOLOGY

Characteristics of lithium phosphorous oxynitride thin films deposited by metal-organic chemical vapor deposition technique

(2013) Hong Tak Kim et al.   JOURNAL OF POWER SOURCES

An interpretation for the increase of ionic conductivity by nitrogen incorporation in LiPON oxynitride glasses

(2013) Nerea Mascaraque et al.   SOLID STATE IONICS

Lithium Phosphate Thin Films Grown by Atomic Layer Deposition

(2012) Jani Hämäläinen et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Atomic layer deposition for nanostructured Li-ion batteries

(2011) H. C. M. Knoops et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Investigation of the local structure of LiPON thin films to better understand the role of nitrogen on their performance

(2011) B. Fleutot et al.   SOLID STATE IONICS

Characteristics and applications of plasma enhanced-atomic layer deposition

(2011) Hyungjun Kim   THIN SOLID FILMS

Lipon thin films grown by plasma-enhanced metalorganic chemical vapor deposition in a N2–H2–Ar gas mixture

(2011) Lamartine Meda et al.   THIN SOLID FILMS

Fabrication of Three-Dimensional Battery Using Ceramic Electrolyte with Honeycomb Structure by Sol–Gel Process

(2010) Masashi Kotobuki et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Self-Supported Three-Dimensional Nanoelectrodes for Microbattery Applications

(2009) Seng Kian Cheah et al.   NANO LETTERS

High Energy Density All-Solid-State Batteries: A Challenging Concept Towards 3D Integration

(2008) Loıc Baggetto et al.   ADVANCED FUNCTIONAL MATERIALS