Investigation of the local structure of LiPON thin films to better understand the role of nitrogen on their performance

Published 2011 View Full Article

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Title
Investigation of the local structure of LiPON thin films to better understand the role of nitrogen on their performance
Authors
Keywords
-
Journal
SOLID STATE IONICS
Volume 186, Issue 1, Pages 29-36
Publisher
Elsevier BV
Online
2011-02-27
DOI
10.1016/j.ssi.2011.01.006

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