Master-Slave Synchronous Control of Dual-Drive Gantry Stage With Cogging Force Compensation

Title
Master-Slave Synchronous Control of Dual-Drive Gantry Stage With Cogging Force Compensation
Authors
Keywords
-
Journal
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2022-06-11
DOI
10.1109/tsmc.2022.3176952

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