Hierachical micro/nano structures fabrication by a novel tri-axial piezoelectric servo system
Published 2022 View Full Article
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Title
Hierachical micro/nano structures fabrication by a novel tri-axial piezoelectric servo system
Authors
Keywords
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Journal
MATERIALS & DESIGN
Volume 224, Issue -, Pages 111330
Publisher
Elsevier BV
Online
2022-10-30
DOI
10.1016/j.matdes.2022.111330
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