Etching of TiO2 nanopillar arrays by nanosphere lithography for broadband infrared antireflection applications
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Title
Etching of TiO2 nanopillar arrays by nanosphere lithography for broadband infrared antireflection applications
Authors
Keywords
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Journal
INFRARED PHYSICS & TECHNOLOGY
Volume 128, Issue -, Pages 104500
Publisher
Elsevier BV
Online
2022-12-07
DOI
10.1016/j.infrared.2022.104500
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