Journal
IEEE ELECTRON DEVICE LETTERS
Volume 43, Issue 11, Pages 1933-1936Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2022.3205326
Keywords
beta-gallium oxide; oxygen annealing; Schottky barrier diode; anode edge termination
Categories
Funding
- NSFC [61925110, 61821091, 62004184, 62004186, 51961145110]
- Strategic Priority Research Program of the Chinese Academy of Sciences (CAS) [XDB44000000]
- Key Research Program of Frontier Sciences of CAS [QYZDB-SSW-JSC048]
- Key-Area Research and Development Program of Guangdong Province [2020B010174002]
- Fundamental Research Plan [JCKY2020110B010]
- Opening Project of Key Laboratory of Microelectronics Devices and Integration Technology in IMECAS
- Key Laboratory of Nanodevices and Applications in Suzhou Institute of Nano-Tech and Nano-Bionics of CAS
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Selective high-resistance zones were successfully achieved on beta-Ga2O3 wafers using a high-temperature oxygen annealing process. Polysilicon was employed as an annealing cap layer to prevent local carrier concentration changes during annealing. Additionally, a high-resistance anode edge termination of Schottky barrier diodes was demonstrated, leading to reduced leakage current and increased breakdown voltage.
Selective area doping technique is essential for diversifying semiconductor device structures. In this letter, selective high-resistance zones on beta-Ga2O3 wafers were successfully achieved by a high-temperature oxygen annealing process. Polysilicon, which proved to have an ideal blocking capability against oxygen annealing ambient, was employed as an annealing cap layer to prevent local carrier concentration changes during annealing. Based on this unique process approach, we further demonstrate a high-resistance anode edge termination of Schottky barrier diodes, which can considerably reduce the leakage current and increase the breakdown voltage of the devices. This research broadens the device manufacturing method and promotes the development of Ga2O3 devices.
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