Etching Characteristics and Mechanisms of MoS2 2D Crystals in O2/Ar Inductively Coupled Plasma

Published 2016 View Full Article

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Title
Etching Characteristics and Mechanisms of MoS2 2D Crystals in O2/Ar Inductively Coupled Plasma
Authors
Keywords
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Journal
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 16, Issue 11, Pages 11201-11209
Publisher
American Scientific Publishers
Online
2016-12-03
DOI
10.1166/jnn.2016.13478

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