Etching Characteristics and Mechanisms of MoS2 2D Crystals in O2/Ar Inductively Coupled Plasma

标题
Etching Characteristics and Mechanisms of MoS2 2D Crystals in O2/Ar Inductively Coupled Plasma
作者
关键词
-
出版物
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume 16, Issue 11, Pages 11201-11209
出版商
American Scientific Publishers
发表日期
2016-12-03
DOI
10.1166/jnn.2016.13478

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