UV-LIGA microfabrication process for sub-terahertz waveguides utilizing multiple layered SU-8 photoresist

Published 2016 View Full Article

  1. Home
  2. Publications
  3. Publication Search
  4. Publication Details
Title
UV-LIGA microfabrication process for sub-terahertz waveguides utilizing multiple layered SU-8 photoresist
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 26, Issue 9, Pages 095010
Publisher
IOP Publishing
Online
2016-07-08
DOI
10.1088/0960-1317/26/9/095010

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Reprint

Contact the author

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Find the ideal target journal for your manuscript

Explore over 38,000 international journals covering a vast array of academic fields.

Search
Webinars Posters Questions Hubs Funding Journals Articles Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.