UV-LIGA microfabrication process for sub-terahertz waveguides utilizing multiple layered SU-8 photoresist

标题
UV-LIGA microfabrication process for sub-terahertz waveguides utilizing multiple layered SU-8 photoresist
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 26, Issue 9, Pages 095010
出版商
IOP Publishing
发表日期
2016-07-08
DOI
10.1088/0960-1317/26/9/095010

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