Optical proximity correction with hierarchical Bayes model

Published 2016 View Full Article

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Title
Optical proximity correction with hierarchical Bayes model
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 15, Issue 2, Pages 021009
Publisher
SPIE-Intl Soc Optical Eng
Online
2016-03-12
DOI
10.1117/1.jmm.15.2.021009

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