Microstructural evolution and thermal stability of HfN/ScN, ZrN/ScN, and Hf0.5Zr0.5N/ScN metal/semiconductor superlattices

Title
Microstructural evolution and thermal stability of HfN/ScN, ZrN/ScN, and Hf0.5Zr0.5N/ScN metal/semiconductor superlattices
Authors
Keywords
Rock Salt, Semiconductor Layer, Metal Nitride, Thermal Stability Study, Transition Metal Nitride
Journal
JOURNAL OF MATERIALS SCIENCE
Volume 51, Issue 17, Pages 8250-8258
Publisher
Springer Nature
Online
2016-06-02
DOI
10.1007/s10853-016-0102-6

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