Thermal stability of epitaxial cubic-TiN/(Al,Sc)N metal/semiconductor superlattices

Title
Thermal stability of epitaxial cubic-TiN/(Al,Sc)N metal/semiconductor superlattices
Authors
Keywords
Scandium, Diffraction Spot, Superlattice Reflection, Increase Annealing Time, Inset Image
Journal
JOURNAL OF MATERIALS SCIENCE
Volume 50, Issue 8, Pages 3200-3206
Publisher
Springer Nature
Online
2016-10-04
DOI
10.1007/s10853-015-8884-5

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