Determination of organic impurities by plasma electron spectroscopy in nonlocal plasma at intermediate and high pressures

Title
Determination of organic impurities by plasma electron spectroscopy in nonlocal plasma at intermediate and high pressures
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 31, Issue 10, Pages 107001
Publisher
IOP Publishing
Online
2022-09-14
DOI
10.1088/1361-6595/ac91a1

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