Determination of organic impurities by plasma electron spectroscopy in nonlocal plasma at intermediate and high pressures
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Title
Determination of organic impurities by plasma electron spectroscopy in nonlocal plasma at intermediate and high pressures
Authors
Keywords
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Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 31, Issue 10, Pages 107001
Publisher
IOP Publishing
Online
2022-09-14
DOI
10.1088/1361-6595/ac91a1
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