Status and challenges in electrical diagnostics of processing plasmas

Published 2014 View Full Article

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Title
Status and challenges in electrical diagnostics of processing plasmas
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 260, Issue -, Pages 401-410
Publisher
Elsevier BV
Online
2014-11-04
DOI
10.1016/j.surfcoat.2014.09.070

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