4.5 Article

Silicon nanocrystal synthesis with the atmospheric plasma source HelixJet

Journal

PLASMA PROCESSES AND POLYMERS
Volume 20, Issue 2, Pages -

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/ppap.202200129

Keywords

atmospheric pressure plasmas; photoluminescence; silane; silicon nanocrystals

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The HelixJet plasma source was utilized to synthesize silicon nanoparticles (Si-NPs) operating under atmospheric pressure. By adjusting the operational parameters, Si-NPs with different sizes, crystallinity, structure, and photoluminescence properties were achieved. The addition of H-2 and high RF powers led to the formation of crystalline nanoparticles with strong photoluminescence intensity, which could be tuned by controlling the synthesis parameters. Post-synthesis annealing allowed for the synthesis of large crystalline nanoparticles. The study also involved design improvements for the HelixJet plasma source, enhancing its stability and enabling continuous long-term operation.
The HelixJet, a plasma source operating under atmospheric pressure with RF power, was used for the synthesis of silicon nanoparticles (Si-NPs) in the context of relevance in nanomedicine, sensor technology, and nanotechnology. The HelixJet was operated with a variety of He/Ar/H-2/SiH4 gas mixtures to characterize the Si-NPs in regard to their size, crystallinity, structure, and photoluminescence. Distinct varieties of nanomaterials in the size range from 3 nm to over 100 nm were synthesized depending on the operation parameters of the HelixJet. Admixture of H-2 alongside high RF powers led to the formation of crystalline nanoparticles with a strong photoluminescence intensity, where the photoluminescence properties as well as the nanocrystal synthesis yield were tunable by adjustment of the synthesis parameters. Post-synthesis in-flight annealing allowed the formation of large crystalline nanoparticles. In addition, the experiments conducted in this study resulted in a design improvement of the HelixJet plasma source that extends the stability of the operating range. Furthermore, the added spatial separation of the He/H-2 and He/Ar/SiH4 streams (SiH4 injection on-axis) minimizes material deposition within the HelixJet and enables continuous long-term operation.

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