Minimizing the Surface Roughness for Silicon Ablation with Ultrashort Laser Pulses

Published 2016 View Full Article

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Title
Minimizing the Surface Roughness for Silicon Ablation with Ultrashort Laser Pulses
Authors
Keywords
-
Journal
Journal of Laser Micro Nanoengineering
Volume 11, Issue 1, Pages 100-103
Publisher
Japan Laser Processing Society
Online
2016-02-29
DOI
10.2961/jlmn.2016.01.0019

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