Minimizing the Surface Roughness for Silicon Ablation with Ultrashort Laser Pulses

标题
Minimizing the Surface Roughness for Silicon Ablation with Ultrashort Laser Pulses
作者
关键词
-
出版物
Journal of Laser Micro Nanoengineering
Volume 11, Issue 1, Pages 100-103
出版商
Japan Laser Processing Society
发表日期
2016-02-29
DOI
10.2961/jlmn.2016.01.0019

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