Monitoring of the Femtosecond Laser Micromachining Process of Materials Immersed in Water by Use of Laser-Induced Breakdown Spectroscopy

Title
Monitoring of the Femtosecond Laser Micromachining Process of Materials Immersed in Water by Use of Laser-Induced Breakdown Spectroscopy
Authors
Keywords
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Journal
Journal of Laser Micro Nanoengineering
Volume 11, Issue 3, Pages 381-387
Publisher
Japan Laser Processing Society
Online
2016-11-03
DOI
10.2961/jlmn.2016.03.0018

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