Monitoring of the Femtosecond Laser Micromachining Process of Materials Immersed in Water by Use of Laser-Induced Breakdown Spectroscopy

Laser micromachining related with ablation can benefit from laser-induced breakdown spectroscopy (LIBS), as this not only allows for determining the chemical composition, but can also lead to an insight into the instant characteristics or quality of the micromachining. In this report, we present results on the application of LIBS in monitoring the micromachining of soda-lime glass immersed in water with femtosecond high repetition rate pulses.