MEMS-based microspectrometer technologies for NIR and MIR wavelengths

In-plane microelectromechanical resonator with integrated Fabry–Pérot cavity

(2008) Marcel W. Pruessner et al.   APPLIED PHYSICS LETTERS

Materials and Processes for MEMS-Based Infrared Microspectrometer Integrated on HgCdTe Detector

(2008) Jaroslaw Antoszewski et al.   IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS

A novel adaptive sliding mode control with application to MEMS gyroscope

(2008) Juntao Fei et al.   ISA TRANSACTIONS

Investigation and characterization of highly efficient near-infrared scanning gratings used in near-infrared microspectrometers

(2008) Fabian Zimmer   Journal of Micro-Nanolithography MEMS and MOEMS

Mid-Infrared Tunable Resonant Cavity Enhanced Detectors

(2008) Niels Quack et al.   SENSORS

An optical fiber methane sensing system employing a two-step reference measuring method

(2008) Yi Jiang et al.   SENSORS AND ACTUATORS B-CHEMICAL