RSM Base Study of the Effect of Argon Gas Flow Rate and Annealing Temperature on the [Bi]:[Te] Ratio and Thermoelectric Properties of Flexible Bi-Te Thin Film
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Title
RSM Base Study of the Effect of Argon Gas Flow Rate and Annealing Temperature on the [Bi]:[Te] Ratio and Thermoelectric Properties of Flexible Bi-Te Thin Film
Authors
Keywords
Flexible Bi<sub>2</sub>Te<sub>3</sub>, RSM, thermoelectric, RF sputtering
Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 46, Issue 5, Pages 2900-2907
Publisher
Springer Nature
Online
2016-10-22
DOI
10.1007/s11664-016-5024-1
References
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