RSM Base Study of the Effect of Argon Gas Flow Rate and Annealing Temperature on the [Bi]:[Te] Ratio and Thermoelectric Properties of Flexible Bi-Te Thin Film
出版年份 2016 全文链接
标题
RSM Base Study of the Effect of Argon Gas Flow Rate and Annealing Temperature on the [Bi]:[Te] Ratio and Thermoelectric Properties of Flexible Bi-Te Thin Film
作者
关键词
Flexible Bi<sub>2</sub>Te<sub>3</sub>, RSM, thermoelectric, RF sputtering
出版物
JOURNAL OF ELECTRONIC MATERIALS
Volume 46, Issue 5, Pages 2900-2907
出版商
Springer Nature
发表日期
2016-10-22
DOI
10.1007/s11664-016-5024-1
参考文献
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