Single‐Step‐Lithography Micro‐Stepper Based on Frictional Contact and Chiral Metamaterial
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Title
Single‐Step‐Lithography Micro‐Stepper Based on Frictional Contact and Chiral Metamaterial
Authors
Keywords
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Journal
Small
Volume 18, Issue 28, Pages 2202128
Publisher
Wiley
Online
2022-06-16
DOI
10.1002/smll.202202128
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