Graphical user interface for SDTrimSP to simulate sputtering, ion implantation and the dynamic effects of ion irradiation
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Title
Graphical user interface for SDTrimSP to simulate sputtering, ion implantation and the dynamic effects of ion irradiation
Authors
Keywords
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Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 522, Issue -, Pages 47-53
Publisher
Elsevier BV
Online
2022-05-11
DOI
10.1016/j.nimb.2022.04.008
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