Sputter deposition of 2D MoS2 thin films -A critical review from a surface and structural perspective
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Title
Sputter deposition of 2D MoS2 thin films -A critical review from a surface and structural perspective
Authors
Keywords
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Journal
INORGANIC CHEMISTRY COMMUNICATIONS
Volume -, Issue -, Pages 109848
Publisher
Elsevier BV
Online
2022-08-11
DOI
10.1016/j.inoche.2022.109848
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