Micro-Electromechanical Systems-based Sensors and Their Applications
Published 2022 View Full Article
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Title
Micro-Electromechanical Systems-based Sensors and Their Applications
Authors
Keywords
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Journal
Applied Science and Convergence Technology
Volume 31, Issue 2, Pages 40-45
Publisher
The Korean Vacuum Society
Online
2022-04-01
DOI
10.5757/asct.2022.31.2.40
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