Charge-transfer interatomic potential for investigation of the thermal-oxidation growth process of silicon

Title
Charge-transfer interatomic potential for investigation of the thermal-oxidation growth process of silicon
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 120, Issue 16, Pages 165109
Publisher
AIP Publishing
Online
2016-10-29
DOI
10.1063/1.4965863

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