On the c-Si|a-SiO2 Interface in Hyperthermal Si Oxidation at Room Temperature

Published 2012 View Full Article

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Title
On the c-Si|a-SiO2 Interface in Hyperthermal Si Oxidation at Room Temperature
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 116, Issue 41, Pages 21856-21863
Publisher
American Chemical Society (ACS)
Online
2012-09-26
DOI
10.1021/jp306920p

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