I-line photolithographic metalenses enabled by distributed optical proximity correction with a deep-learning model

Title
I-line photolithographic metalenses enabled by distributed optical proximity correction with a deep-learning model
Authors
Keywords
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Journal
OPTICS EXPRESS
Volume 30, Issue 12, Pages 21184
Publisher
Optica Publishing Group
Online
2022-05-24
DOI
10.1364/oe.456469

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