I-line photolithographic metalenses enabled by distributed optical proximity correction with a deep-learning model
Published 2022 View Full Article
- Home
- Publications
- Publication Search
- Publication Details
Title
I-line photolithographic metalenses enabled by distributed optical proximity correction with a deep-learning model
Authors
Keywords
-
Journal
OPTICS EXPRESS
Volume 30, Issue 12, Pages 21184
Publisher
Optica Publishing Group
Online
2022-05-24
DOI
10.1364/oe.456469
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- Principles, Functions, and Applications of Optical Meta‐Lens
- (2021) Mu Ku Chen et al. Advanced Optical Materials
- Will flat optics appear in everyday life anytime soon?
- (2021) Wei Ting Chen et al. APPLIED PHYSICS LETTERS
- Quo Vadis, Metasurfaces?
- (2021) Cheng-Wei Qiu et al. NANO LETTERS
- Low-loss metasurface optics down to the deep ultraviolet region
- (2020) Cheng Zhang et al. Light-Science & Applications
- Octave bandwidth photonic fishnet-achromatic-metalens
- (2020) Abdoulaye Ndao et al. Nature Communications
- From IC Layout to Die Photograph: A CNN-Based Data-Driven Approach
- (2020) Hao-Chiang Shao et al. IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS
- All-Glass, Large Metalens at Visible Wavelength Using Deep-Ultraviolet Projection Lithography
- (2019) Joon-Suh Park et al. NANO LETTERS
- Broadband achromatic metalens in terahertz regime
- (2019) Qingqing Cheng et al. Science Bulletin
- Ultrahigh Numerical Aperture Metalens at Visible Wavelengths
- (2018) Haowen Liang et al. NANO LETTERS
- A Metalens with a Near-Unity Numerical Aperture
- (2018) Ramón Paniagua-Domínguez et al. NANO LETTERS
- A broadband achromatic metalens in the visible
- (2018) Shuming Wang et al. Nature Nanotechnology
- A broadband achromatic metalens for focusing and imaging in the visible
- (2018) Wei Ting Chen et al. Nature Nanotechnology
- Large area metalenses: design, characterization, and mass manufacturing
- (2018) Alan She et al. OPTICS EXPRESS
- Advances in optical metasurfaces: fabrication and applications [Invited]
- (2018) Vin-Cent Su et al. OPTICS EXPRESS
- Recent advances in high-contrast metastructures, metasurfaces, and photonic crystals
- (2018) Pengfei Qiao et al. Advances in Optics and Photonics
- Silicon Nitride Metalenses for Close-to-One Numerical Aperture and Wide-Angle Visible Imaging
- (2018) Zhi-Bin Fan et al. Physical Review Applied
- Varifocal zoom imaging with large area focal length adjustable metalenses
- (2018) Shane Colburn et al. Optica
- Data Efficient Lithography Modeling with Transfer Learning and Active Data Selection
- (2018) Yibo Lin et al. IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS
- Broadband achromatic dielectric metalenses
- (2018) Sajan Shrestha et al. Light-Science & Applications
- Metalenses at visible wavelengths: past, present, perspectives
- (2017) Philippe Lalanne et al. Laser & Photonics Reviews
- Meta-Lens Doublet in the Visible Region
- (2017) Benedikt Groever et al. NANO LETTERS
- Metalenses: Versatile multifunctional photonic components
- (2017) Mohammadreza Khorasaninejad et al. SCIENCE
- Recent advances in planar optics: from plasmonic to dielectric metasurfaces
- (2017) Patrice Genevet et al. Optica
- Nanomanufacturing: A Perspective
- (2016) J. Alexander Liddle et al. ACS Nano
- A review of metasurfaces: physics and applications
- (2016) Hou-Tong Chen et al. REPORTS ON PROGRESS IN PHYSICS
- Miniature optical planar camera based on a wide-angle metasurface doublet corrected for monochromatic aberrations
- (2016) Amir Arbabi et al. Nature Communications
- High resolution optical lithography or high throughput electron beam lithography: The technical struggle from the micro to the nano-fabrication evolution
- (2015) Shinji Okazaki MICROELECTRONIC ENGINEERING
- Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission
- (2015) Amir Arbabi et al. Nature Nanotechnology
- Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays
- (2015) Amir Arbabi et al. Nature Communications
- Dielectric gradient metasurface optical elements
- (2014) D. Lin et al. SCIENCE
- Band-limited angular spectrum method for numerical simulation of free-space propagation in far and near fields
- (2009) Kyoji Matsushima et al. OPTICS EXPRESS
Discover Peeref hubs
Discuss science. Find collaborators. Network.
Join a conversationAdd your recorded webinar
Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.
Upload Now