Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy

Title
Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy
Authors
Keywords
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Journal
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY
Volume 31, Issue 11, Pages 2207-2212
Publisher
Royal Society of Chemistry (RSC)
Online
2016-10-06
DOI
10.1039/c6ja00251j

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