Density measurement of thin layers by electron energy loss spectroscopy (EELS)

Published 2013 View Full Article

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Title
Density measurement of thin layers by electron energy loss spectroscopy (EELS)
Authors
Keywords
-
Journal
MICRON
Volume 50, Issue -, Pages 57-61
Publisher
Elsevier BV
Online
2013-06-02
DOI
10.1016/j.micron.2013.05.001

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