Bubble Behavior and Its Effect on Surface Integrity in Laser-Induced Plasma Micro-Machining Silicon Wafer
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Title
Bubble Behavior and Its Effect on Surface Integrity in Laser-Induced Plasma Micro-Machining Silicon Wafer
Authors
Keywords
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Journal
JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME
Volume 144, Issue 9, Pages -
Publisher
ASME International
Online
2022-04-25
DOI
10.1115/1.4054416
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