Quadrature moment simulation of silica nanoparticles aggregation and breakage in chemical mechanical polishing
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Title
Quadrature moment simulation of silica nanoparticles aggregation and breakage in chemical mechanical polishing
Authors
Keywords
Computational fluid dynamics (CFD), Quadrature method of moments (QMOM), Quadrature-based moment methods (QBMM), Chemical mechanical polishing (CMP), Semiconductor fabrication, Simulation analysis, Aggregation and breakage, Silica nanoparticle
Journal
JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY
Volume 107, Issue -, Pages 207-214
Publisher
Elsevier BV
Online
2021-12-01
DOI
10.1016/j.jiec.2021.11.049
References
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