Quadrature moment simulation of silica nanoparticles aggregation and breakage in chemical mechanical polishing

Title
Quadrature moment simulation of silica nanoparticles aggregation and breakage in chemical mechanical polishing
Authors
Keywords
Computational fluid dynamics (CFD), Quadrature method of moments (QMOM), Quadrature-based moment methods (QBMM), Chemical mechanical polishing (CMP), Semiconductor fabrication, Simulation analysis, Aggregation and breakage, Silica nanoparticle
Journal
JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY
Volume 107, Issue -, Pages 207-214
Publisher
Elsevier BV
Online
2021-12-01
DOI
10.1016/j.jiec.2021.11.049

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