Effect of precursor purity and flow rate on the CVD growth of hexagonal boron nitride

Published 2016 View Full Article

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Title
Effect of precursor purity and flow rate on the CVD growth of hexagonal boron nitride
Authors
Keywords
Hexagonal boron nitride, Chemical vapor deposition, Purity, Flow rate
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 688, Issue -, Pages 1006-1012
Publisher
Elsevier BV
Online
2016-07-17
DOI
10.1016/j.jallcom.2016.07.117

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