Effect of precursor purity and flow rate on the CVD growth of hexagonal boron nitride

标题
Effect of precursor purity and flow rate on the CVD growth of hexagonal boron nitride
作者
关键词
Hexagonal boron nitride, Chemical vapor deposition, Purity, Flow rate
出版物
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 688, Issue -, Pages 1006-1012
出版商
Elsevier BV
发表日期
2016-07-17
DOI
10.1016/j.jallcom.2016.07.117

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