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Title
Compensation of p-type doping in Al-doped 4H-SiC
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 131, Issue 18, Pages 185703
Publisher
AIP Publishing
Online
2022-05-10
DOI
10.1063/5.0085510
References
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Related references
Note: Only part of the references are listed.- Theoretical study on the improvement of the doping efficiency of Al in 4H-SiC by co-doping group-IVB elements
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- (2018) Fabrizio Roccaforte et al. MICROELECTRONIC ENGINEERING
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- (2018) E. Igumbor et al. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
- Growth of P-type 4H–SiC single crystals by physical vapor transport using aluminum and nitrogen co-doping
- (2017) Kazuma Eto et al. JOURNAL OF CRYSTAL GROWTH
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- Negative-USystem of Carbon Vacancy in4H-SiC
- (2012) N. T. Son et al. PHYSICAL REVIEW LETTERS
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