Low temperature Cu/Ti/Al Ohmic contacts to p-type 4H-SiC

Title
Low temperature Cu/Ti/Al Ohmic contacts to p-type 4H-SiC
Authors
Keywords
4H-SiC, Ohmic contact, Cu/Ti/Al, Contact resistivity
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 901, Issue -, Pages 163580
Publisher
Elsevier BV
Online
2022-01-04
DOI
10.1016/j.jallcom.2021.163580

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