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Title
Low temperature Cu/Ti/Al Ohmic contacts to p-type 4H-SiC
Authors
Keywords
4H-SiC, Ohmic contact, Cu/Ti/Al, Contact resistivity
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 901, Issue -, Pages 163580
Publisher
Elsevier BV
Online
2022-01-04
DOI
10.1016/j.jallcom.2021.163580
References
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Related references
Note: Only part of the references are listed.- Morphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC
- (2019) S. Rascunà et al. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
- Ohmic contacts simultaneously formed on n-type and p-type 4H-SiC at low temperature
- (2019) Yanjing He et al. JOURNAL OF ALLOYS AND COMPOUNDS
- Role of W in W/Ni Bilayer Ohmic Contact to n-Type 4H-SiC From the Perspective of Device Applications
- (2018) Shu-Yue Jiang et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
- Emerging trends in wide band gap semiconductors (SiC and GaN) technology for power devices
- (2018) Fabrizio Roccaforte et al. MICROELECTRONIC ENGINEERING
- Experimental Investigation of Piezoresistive Effect in p-Type 4H–SiC
- (2017) Tuan-Khoa Nguyen et al. IEEE ELECTRON DEVICE LETTERS
- A Study on the Temperature of Ohmic Contact to p-Type SiC Based on Ti3SiC2Phase
- (2016) Tony Abi-Tannous et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
- Parametric investigation of the formation of epitaxial Ti3SiC2 on 4H-SiC from Al-Ti annealing
- (2015) T. Abi-Tannous et al. APPLIED SURFACE SCIENCE
- Ti/Al/W Ohmic contacts to p-type implanted 4H-SiC
- (2015) M. Vivona et al. JOURNAL OF APPLIED PHYSICS
- Effects of annealing temperature on the structure and electrical properties of tungsten contacts to n-type silicon carbide
- (2015) Jacek Rogowski et al. Materials Science and Engineering B-Advanced Functional Solid-State Materials
- Amorphous Ni–Zr layer applied for microstructure improvement of Ni-based ohmic contacts to SiC
- (2015) M. Wzorek et al. Materials Science and Engineering B-Advanced Functional Solid-State Materials
- Effects of annealing temperature on the structure and electrical properties of tungsten contacts to n-type silicon carbide
- (2015) Jacek Rogowski et al. Materials Science and Engineering B-Advanced Functional Solid-State Materials
- Amorphous Ni–Zr layer applied for microstructure improvement of Ni-based ohmic contacts to SiC
- (2015) M. Wzorek et al. Materials Science and Engineering B-Advanced Functional Solid-State Materials
- Critical issues for interfaces to p-type SiC and GaN in power devices
- (2012) F. Roccaforte et al. APPLIED SURFACE SCIENCE
- Role of carbon in the formation of ohmic contact in Ni/4HSiC and Ni/Ti/4HSiC
- (2012) M. Siad et al. APPLIED SURFACE SCIENCE
- Ohmic contact properties of magnetron sputtered Ti3SiC2 on n- and p-type 4H-silicon carbide
- (2011) K. Buchholt et al. APPLIED PHYSICS LETTERS
- Structural characterization of Ni and Ni/Ti ohmic contact on n-type 4H–SiC
- (2011) M. Siad et al. APPLIED SURFACE SCIENCE
- A Novel Tungsten–Nickel Alloy Ohmic Contact to SiC at 900 $^{\circ}\hbox{C}$
- (2010) R S Okojie et al. IEEE ELECTRON DEVICE LETTERS
- Stable Electrical Operation of 6H–SiC JFETs and ICs for Thousands of Hours at 500 $^{\circ}\hbox{C}$
- (2008) Philip G. Neudeck et al. IEEE ELECTRON DEVICE LETTERS
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