Effect of Etched Silicon Substrate on Structural, Morphological, and Optical Properties of Deposited ZnO Films via DC Sputtering

Title
Effect of Etched Silicon Substrate on Structural, Morphological, and Optical Properties of Deposited ZnO Films via DC Sputtering
Authors
Keywords
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Journal
Aerosol Science and Engineering
Volume 6, Issue 1, Pages 30-44
Publisher
Springer Science and Business Media LLC
Online
2021-11-24
DOI
10.1007/s41810-021-00122-5

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