Effect of Etched Silicon Substrate on Structural, Morphological, and Optical Properties of Deposited ZnO Films via DC Sputtering
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Title
Effect of Etched Silicon Substrate on Structural, Morphological, and Optical Properties of Deposited ZnO Films via DC Sputtering
Authors
Keywords
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Journal
Aerosol Science and Engineering
Volume 6, Issue 1, Pages 30-44
Publisher
Springer Science and Business Media LLC
Online
2021-11-24
DOI
10.1007/s41810-021-00122-5
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