Big data analytics for forecasting cycle time in semiconductor wafer fabrication system
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Title
Big data analytics for forecasting cycle time in semiconductor wafer fabrication system
Authors
Keywords
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Journal
INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH
Volume 54, Issue 23, Pages 7231-7244
Publisher
Informa UK Limited
Online
2016-04-23
DOI
10.1080/00207543.2016.1174789
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