Evaporation Effect on Thickness Distribution for Spin-Coated Films on Rectangular and Circular Substrates

Published 2021 View Full Article

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Title
Evaporation Effect on Thickness Distribution for Spin-Coated Films on Rectangular and Circular Substrates
Authors
Keywords
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Journal
Coatings
Volume 11, Issue 11, Pages 1322
Publisher
MDPI AG
Online
2021-11-02
DOI
10.3390/coatings11111322
References
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